Zinc‐Imidazolate Films as an All‐Dry Resist Technology

Howard Fairbrother | Advanced Functional Materials, 2023 

The Fairbrother Group in collaboration with the Tsapatsis group in Chemical and Biomolecular Engineering have introduced a new direction for solvent-free lithography, offering the prospect of scalable high-resolution patterning techniques for advanced semiconductor fabrication.

Zinc‐Imidazolate Films as an All‐Dry Resist Technology